Optical systems in the deep UV wavelength range are used in a variety of applications such as life sciences, high-resolution microscopy and, in particular, semiconductor manufacturing. The SHSCam HR4-130-GE-DUV wavefront sensor can now be used for the alignment and testing of these optics: At a wavelength of 193 nm, an energy density of 5*10-4 J/cm² is sufficient for the sensor to provide a well-exposed measurement signal – it is therefore 30 times more sensitive than the SHSCam SHR6-130-GE-DUV.
With a repeatability of 1 nm RMS for wavefront measurements and a basic accuracy of 3 nm RMS, the SHSCam HR4-130-GE-DUV can be used for the most demanding measurement tasks. It precisely detects the finest misalignments in optical systems with high stability, quickly characterizes light sources, or evaluates the wavefront of laser beams formed by SLMs or adaptive mirrors.
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key Advantages
1. Fast single-shot measurement with 16Hz wavefront evaluation rate
2. High intrinsic stability and reliability
3. High dynamic range: +/- 5° tilt, 30mm local WF curvature
4. Industry-mature and powerful GigE bus system
5. Powerful and configurable software
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Specifications
